6/23/2011	9:24:29 AM	Bypass valve closed
6/23/2011	9:24:44 AM	Program exited cleanly
6/23/2011	9:26:20 AM	Program started normally
6/23/2011	9:26:20 AM	Helium valve closed
6/23/2011	9:26:20 AM	H2 valve closed
6/23/2011	9:26:20 AM	BCl3 valve closed
6/23/2011	9:26:20 AM	PH3 valve closed
6/23/2011	9:26:20 AM	SiCl4 pre valve closed
6/23/2011	9:26:20 AM	SiCl4 post valve closed
6/23/2011	9:26:20 AM	Main Vac valve closed
6/23/2011	9:26:20 AM	Bypass valve closed
6/23/2011	9:26:20 AM	Bubbler valve closed
6/23/2011	9:26:20 AM	Helium MFC set to  0.000000
6/23/2011	9:26:20 AM	H2 MFC set to  0.000000
6/23/2011	9:26:20 AM	BCl3 MFC set to  0.000000
6/23/2011	9:26:20 AM	PHl3 MFC set to  0.000000
6/23/2011	9:26:20 AM	SiCl4 MFC set to  0.000000
6/23/2011	9:26:20 AM	Bypass solenoid MFC set to  760.000000
6/23/2011	9:26:20 AM	Tube furnace set to 0
6/23/2011	9:26:33 AM	Bubbler valve opened
6/23/2011	9:26:36 AM	Bubbler valve closed
6/23/2011	9:26:37 AM	Bubbler valve opened
6/23/2011	9:38:33 AM	Bubbler valve closed
6/23/2011	9:38:36 AM	Bubbler valve opened
6/23/2011	9:38:38 AM	Bubbler valve closed
6/23/2011	9:38:39 AM	Bubbler valve opened
6/23/2011	9:38:41 AM	Bubbler valve closed
6/23/2011	9:39:10 AM	Bubbler valve opened
6/23/2011	9:39:55 AM	Bubbler valve closed
6/23/2011	9:39:58 AM	Bubbler valve opened
6/23/2011	9:40:03 AM	Bubbler valve closed
6/23/2011	9:41:31 AM	Program exited cleanly
6/23/2011	9:42:06 AM	Program started normally
6/23/2011	9:42:06 AM	Helium valve closed
6/23/2011	9:42:06 AM	H2 valve closed
6/23/2011	9:42:06 AM	BCl3 valve closed
6/23/2011	9:42:06 AM	PH3 valve closed
6/23/2011	9:42:06 AM	SiCl4 pre valve closed
6/23/2011	9:42:06 AM	SiCl4 post valve closed
6/23/2011	9:42:06 AM	Main Vac valve closed
6/23/2011	9:42:06 AM	Bypass valve closed
6/23/2011	9:42:06 AM	Bubbler valve closed
6/23/2011	9:42:06 AM	Helium MFC set to  0.000000
6/23/2011	9:42:06 AM	H2 MFC set to  0.000000
6/23/2011	9:42:06 AM	BCl3 MFC set to  0.000000
6/23/2011	9:42:06 AM	PHl3 MFC set to  0.000000
6/23/2011	9:42:06 AM	SiCl4 MFC set to  0.000000
6/23/2011	9:42:06 AM	Bypass solenoid MFC set to  760.000000
6/23/2011	9:42:06 AM	Tube furnace set to 0
6/23/2011	9:42:22 AM	Program exited cleanly
6/23/2011	9:48:07 AM	Program started normally
6/23/2011	9:48:07 AM	Helium valve closed
6/23/2011	9:48:07 AM	H2 valve closed
6/23/2011	9:48:07 AM	BCl3 valve closed
6/23/2011	9:48:07 AM	PH3 valve closed
6/23/2011	9:48:07 AM	SiCl4 pre valve closed
6/23/2011	9:48:07 AM	SiCl4 post valve closed
6/23/2011	9:48:07 AM	Main Vac valve closed
6/23/2011	9:48:07 AM	Bypass valve closed
6/23/2011	9:48:07 AM	Bubbler valve closed
6/23/2011	9:48:07 AM	Helium MFC set to  0.000000
6/23/2011	9:48:07 AM	H2 MFC set to  0.000000
6/23/2011	9:48:07 AM	BCl3 MFC set to  0.000000
6/23/2011	9:48:07 AM	PHl3 MFC set to  0.000000
6/23/2011	9:48:07 AM	SiCl4 MFC set to  0.000000
6/23/2011	9:48:07 AM	Bypass solenoid MFC set to  760.000000
6/23/2011	9:48:07 AM	Tube furnace set to 0
6/23/2011	9:48:08 AM	Bubbler valve opened
6/23/2011	9:48:08 AM	Bubbler valve closed
6/23/2011	9:48:09 AM	Bubbler valve opened
6/23/2011	9:48:10 AM	Bubbler valve closed
6/23/2011	9:49:49 AM	Bubbler valve opened
6/23/2011	9:49:50 AM	Bubbler valve closed
6/23/2011	9:49:50 AM	Bubbler valve opened
6/23/2011	9:49:51 AM	Bubbler valve closed
6/23/2011	9:49:51 AM	Bubbler valve opened
6/23/2011	9:49:52 AM	Bubbler valve closed
6/23/2011	9:50:37 AM	Program exited cleanly
6/23/2011	9:07:40 PM	Program started normally
6/23/2011	9:07:41 PM	Helium valve closed
6/23/2011	9:07:41 PM	H2 valve closed
6/23/2011	9:07:41 PM	BCl3 valve closed
6/23/2011	9:07:41 PM	PH3 valve closed
6/23/2011	9:07:41 PM	SiCl4 pre valve closed
6/23/2011	9:07:41 PM	SiCl4 post valve closed
6/23/2011	9:07:41 PM	Main Vac valve closed
6/23/2011	9:07:41 PM	Bypass valve closed
6/23/2011	9:07:41 PM	Bubbler valve closed
6/23/2011	9:07:41 PM	Helium MFC set to  0.000000
6/23/2011	9:07:41 PM	H2 MFC set to  0.000000
6/23/2011	9:07:41 PM	BCl3 MFC set to  0.000000
6/23/2011	9:07:41 PM	PHl3 MFC set to  0.000000
6/23/2011	9:07:41 PM	SiCl4 MFC set to  0.000000
6/23/2011	9:07:41 PM	Bypass solenoid MFC set to  760.000000
6/23/2011	9:07:41 PM	Tube furnace set to 0
6/23/2011	9:07:48 PM	Tube furnace set to 25
6/23/2011	9:07:52 PM	Tube furnace set to 0
6/23/2011	9:08:05 PM	Program exited cleanly
6/23/2011	9:37:42 PM	Program started normally
6/23/2011	9:37:42 PM	Helium valve closed
6/23/2011	9:37:42 PM	H2 valve closed
6/23/2011	9:37:42 PM	BCl3 valve closed
6/23/2011	9:37:42 PM	PH3 valve closed
6/23/2011	9:37:42 PM	SiCl4 pre valve closed
6/23/2011	9:37:42 PM	SiCl4 post valve closed
6/23/2011	9:37:42 PM	Main Vac valve closed
6/23/2011	9:37:42 PM	Bypass valve closed
6/23/2011	9:37:42 PM	Bubbler valve closed
6/23/2011	9:37:42 PM	Helium MFC set to  0.000000
6/23/2011	9:37:42 PM	H2 MFC set to  0.000000
6/23/2011	9:37:42 PM	BCl3 MFC set to  0.000000
6/23/2011	9:37:42 PM	PHl3 MFC set to  0.000000
6/23/2011	9:37:42 PM	SiCl4 MFC set to  0.000000
6/23/2011	9:37:42 PM	Bypass solenoid MFC set to  760.000000
6/23/2011	9:37:42 PM	Tube furnace set to 0
6/23/2011	9:37:53 PM	Program exited cleanly
6/23/2011	9:45:10 PM	Program started normally
6/23/2011	9:45:10 PM	Helium valve closed
6/23/2011	9:45:10 PM	H2 valve closed
6/23/2011	9:45:10 PM	BCl3 valve closed
6/23/2011	9:45:10 PM	PH3 valve closed
6/23/2011	9:45:10 PM	SiCl4 pre valve closed
6/23/2011	9:45:10 PM	SiCl4 post valve closed
6/23/2011	9:45:10 PM	Main Vac valve closed
6/23/2011	9:45:10 PM	Bypass valve closed
6/23/2011	9:45:10 PM	Bubbler valve closed
6/23/2011	9:45:10 PM	Helium MFC set to  0.000000
6/23/2011	9:45:10 PM	H2 MFC set to  0.000000
6/23/2011	9:45:10 PM	BCl3 MFC set to  0.000000
6/23/2011	9:45:10 PM	PHl3 MFC set to  0.000000
6/23/2011	9:45:10 PM	SiCl4 MFC set to  0.000000
6/23/2011	9:45:10 PM	Bypass solenoid MFC set to  760.000000
6/23/2011	9:45:11 PM	Tube furnace set to 0
6/23/2011	9:45:26 PM	Bypass valve opened
6/23/2011	9:45:26 PM	Bypass valve closed
6/23/2011	9:45:27 PM	Main Vac valve opened
6/23/2011	9:45:28 PM	Main Vac valve closed
6/23/2011	9:45:31 PM	Main Vac valve opened
6/23/2011	9:45:32 PM	Main Vac valve closed
6/23/2011	9:45:43 PM	Bubbler valve opened
6/23/2011	9:45:43 PM	Bubbler valve closed
6/23/2011	9:45:44 PM	Bubbler valve opened
6/23/2011	9:45:44 PM	Bubbler valve closed
6/23/2011	9:45:56 PM	Program exited cleanly
6/23/2011	9:46:53 PM	Program started normally
6/23/2011	9:46:53 PM	Helium valve closed
6/23/2011	9:46:53 PM	H2 valve closed
6/23/2011	9:46:53 PM	BCl3 valve closed
6/23/2011	9:46:53 PM	PH3 valve closed
6/23/2011	9:46:53 PM	SiCl4 pre valve closed
6/23/2011	9:46:53 PM	SiCl4 post valve closed
6/23/2011	9:46:53 PM	Main Vac valve closed
6/23/2011	9:46:53 PM	Bypass valve closed
6/23/2011	9:46:53 PM	Bubbler valve closed
6/23/2011	9:46:53 PM	Helium MFC set to  0.000000
6/23/2011	9:46:53 PM	H2 MFC set to  0.000000
6/23/2011	9:46:53 PM	BCl3 MFC set to  0.000000
6/23/2011	9:46:53 PM	PHl3 MFC set to  0.000000
6/23/2011	9:46:53 PM	SiCl4 MFC set to  0.000000
6/23/2011	9:46:53 PM	Bypass solenoid MFC set to  760.000000
6/23/2011	9:46:53 PM	Tube furnace set to 0
6/23/2011	9:46:57 PM	Program exited cleanly
6/23/2011	9:47:37 PM	Program started normally
6/23/2011	9:47:37 PM	Helium valve closed
6/23/2011	9:47:37 PM	H2 valve closed
6/23/2011	9:47:37 PM	BCl3 valve closed
6/23/2011	9:47:37 PM	PH3 valve closed
6/23/2011	9:47:37 PM	SiCl4 pre valve closed
6/23/2011	9:47:37 PM	SiCl4 post valve closed
6/23/2011	9:47:37 PM	Main Vac valve closed
6/23/2011	9:47:37 PM	Bypass valve closed
6/23/2011	9:47:37 PM	Bubbler valve closed
6/23/2011	9:47:37 PM	Helium MFC set to  0.000000
6/23/2011	9:47:37 PM	H2 MFC set to  0.000000
6/23/2011	9:47:37 PM	BCl3 MFC set to  0.000000
6/23/2011	9:47:37 PM	PHl3 MFC set to  0.000000
6/23/2011	9:47:37 PM	SiCl4 MFC set to  0.000000
6/23/2011	9:47:37 PM	Bypass solenoid MFC set to  760.000000
6/23/2011	9:47:37 PM	Tube furnace set to 0
6/23/2011	9:48:28 PM	Program exited cleanly
6/23/2011	9:48:31 PM	Program started normally
6/23/2011	9:48:31 PM	Helium valve closed
6/23/2011	9:48:31 PM	H2 valve closed
6/23/2011	9:48:31 PM	BCl3 valve closed
6/23/2011	9:48:31 PM	PH3 valve closed
6/23/2011	9:48:31 PM	SiCl4 pre valve closed
6/23/2011	9:48:31 PM	SiCl4 post valve closed
6/23/2011	9:48:31 PM	Main Vac valve closed
6/23/2011	9:48:31 PM	Bypass valve closed
6/23/2011	9:48:31 PM	Bubbler valve closed
6/23/2011	9:48:31 PM	Helium MFC set to  0.000000
6/23/2011	9:48:31 PM	H2 MFC set to  0.000000
6/23/2011	9:48:31 PM	BCl3 MFC set to  0.000000
6/23/2011	9:48:31 PM	PHl3 MFC set to  0.000000
6/23/2011	9:48:31 PM	SiCl4 MFC set to  0.000000
6/23/2011	9:48:31 PM	Bypass solenoid MFC set to  760.000000
6/23/2011	9:48:32 PM	Tube furnace set to 0
6/23/2011	9:49:28 PM	Program exited cleanly
